HHV AT Twin Door Metallizer

High speed rotary, roots and diffusion pumps with cryo-cooler

Glow discharge substrate pre-clean

THERMAL EVAPORATION:Cycle time of < 10 minutes Spool size of 960 mm diameter x 1570 mm height

Rotary drive mechanism with ferro fluidic vacuum shaft

Fully automated operation

SPUTTERING:
Cycle time of < 4 minutes

Spool size of 710 mm diameter x 1370 mm height

Rotary drive mechanism with ferro fluidic vacuum shaftPlasma polymerization by mid frequency power supply for pre and post coat

Flexible process cycle