Thin Film Equipment

Products

Hybrid

ATS Series

ATS 500

ATS Series

The ATS Series are mid sized coaters for production and large wafer Rand D applications. The ATS Series is clean room compatible and offers high throughput efficiency.

Glove Box Series

GBIC

Glove Box Series

The glove box integrated coaters is a combinatorial system of vacuum coaters and glove box enabling end to end processing of samples under controlled atmospheres. 

Request a Quote