Thin Film Equipment

ATS Series

ATS 500

The ATS Series are mid sized coaters for production and large wafer Rand D applications. The ATS Series is clean room compatible and offers high throughput efficiency.

Ion Beam Sputtering Series

DIBS 

The HHV DIBS is a dual ion beam sputtering system for optical and dielectric thin-film applications. The HHV DIBS is clean-room compatible and delivers dense, low-loss coatings for research, prototyping, and small-volume production.

Glove Box Series

GBIC

The glove box integrated coaters is a combinatorial system of vacuum coaters and glove box enabling end to end processing of samples under controlled atmospheres.