Thin Film Equipment

Products / Hybrid

ATS Series

The ATS 500 is a mid sized coaters for production and large wafer R and D applications. The ATS 500 is clean room compatible and offers high throughput efficiency with a source to substrate distance of up to 20” .


    Modular segmentation of system components
    Supports multiple deposition processes
    500 mm wide x 500 mm high, D-shaped chamber with hinged door
    Full Color, Touch Screen PLC with integrated process recipe-driven process and vacuum control
    Extended height versions are available for applications such as lift-off coatings
    1460mm x 1670 mm system footprint