ATS Series
The ATS 500 is a mid sized coaters for production and large wafer R and D applications. The ATS 500 is clean room compatible and offers high throughput efficiency with a source to substrate distance of up to 20” .
Features
The ATS 500 is a mid sized coaters for production and large wafer R and D applications. The ATS 500 is clean room compatible and offers high throughput efficiency with a source to substrate distance of up to 20” .
Features