Thin Film Equipment

Products / R&D

Cluster Tool Series

The CT series combines multiple PVD and CVD process capabilities in the same run to fabricate multilayer stacks and device architectures. Each module can be configured individually to meet your technological requirements, while also being extendable for future expansion.


    Modular design with up to 5 process chambers
    PC/PLC controlled recipes for single, batch, or automated processes
    Manual or automated substrate transfer
    Advanced data logging and process tracking
    Sample heating, cooling, bias, and cleaning options
    Choice of system configurations