Thin Film Equipment

Products / R&D

Auto Series

The Auto Series platform offers compact, economical and rugged solutions suitable for multiple process applications. HHVAT offers wide range of modular process accessories for numerous research applications.


    Variety of chamber options
    In-situ process monitoring and vacuum control option
    No pneumatics, all electronic components
    Supports multiple deposition processes
    Compatible with new or existing glove box units
    CE standards
    Range of work holders and heaters
    PLC controller for automated vacuum cycle
    630 mm x 1500 mm system footprint