Thin Film Equipment

Products / R&D

SAARA Series

The SAARA platform is made of superior performance single block aluminium chamber to deposit electronic and optical coatings of the highest quality. The SAARA platform comes with a load-lock chamber, automated substrate transfer mechanism and a touch-screen PC with complete process automation.


    Substrate plate to accommodate up to 8” wafers
    Built-in process recipes
    Substrate biasing options of DC, Pulsed DC or RF
    Compact cabinet design offering minimized footprint
    In-situ cleaning
    Dual frequency (RF & LF) power supply for film stress control
    Substrate heating up to 800°C