Thin Film Equipment

Products / R&D

Smart Coat Series

The Smart Coat Series are ideal entry level solutions for budding researchers. The platform provides cost-effective solutions for a range of PVD processes using thermal resistance sources, glow discharge cleaning, electron beam sources, effusion cells, or magnetron sputtering sources.


    Variety of chamber options
    In-situ process monitoring and control option
    Supports multiple deposition process
    PLC controller for automated vacuum cycle
    Range of work holders and heaters
    630 mm x 1500 mm system footprint