PECVD
Plasma enhanced chemical vapour deposition (PECVD) processes induce a chemical reaction between coupled electrodes which results in a thin film being deposited on a substrate. HHVAT offers PECVD systems in various configurations such as single, load-lock and multi-chamber cluster tools to suit customer needs.
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We are proud of the cutting-edge R&D our customers are doing using HHVAT PECVD systems and we want to communicate their scientific work. Our customers research has significant contributions towards technological advancements in various applications from optoelectronics, semiconductors, energy, and quantum technologies to advanced materials. Here is the compilation of
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Jun 2019
Outstanding Room-Temperature Hydrogen Gas Detection by Plasma-Assisted and Graphene-functionalized Core−Shell Assembly of SnO2 Nanoburflower
Anupam Nandi, Pratanu Nag, Dipankar Panda, Sukanta Dhar, Syed Minhaz Hossain, Hiranmay Saha, and Sanhita Majumdar
DOI: 10.1021/acsomega.9b01372
CT150
Sensors
Publication date
Jun 2019
Research Paper Title
Outstanding Room-Temperature Hydrogen Gas Detection by Plasma-Assisted and Graphene-functionalized Core−Shell Assembly of SnO2 Nanoburflower
Authors
Anupam Nandi, Pratanu Nag, Dipankar Panda, Sukanta Dhar, Syed Minhaz Hossain, Hiranmay Saha, and Sanhita Majumdar
Publication link
DOI: 10.1021/acsomega.9b01372
Used HHVAT System/ Technology
CT150
Application
Sensors
Oct 2018
Investigations on a-Si: H thin film solar cells by RF-PECVD
T.K. Subramanyam, S. Pavan Kumar, P. Goutham, R. Suresh, K.N. Subramanya
DOI: 10.1016/j.matpr.2018.06.500
HHV PECVD
Photovoltaics
Publication date
Oct 2018
Research Paper Title
Investigations on a-Si: H thin film solar cells by RF-PECVD
Authors
T.K. Subramanyam, S. Pavan Kumar, P. Goutham, R. Suresh, K.N. Subramanya
Publication link
DOI: 10.1016/j.matpr.2018.06.500
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
April 2018
Current Controlled Switching in Si/PS/a-Si Heterostructure
Sudipta Chakrabarty, Sourav Manda, Ujjwal Ghanta, Jayoti Das, and Syed Minhaz Hossain
DOI : 10.1016/j.matpr.2017.10.168
CT150
Semiconductor
Publication date
April 2018
Research Paper Title
Current Controlled Switching in Si/PS/a-Si Heterostructure
Authors
Sudipta Chakrabarty, Sourav Manda, Ujjwal Ghanta, Jayoti Das, and Syed Minhaz Hossain
Publication link
DOI : 10.1016/j.matpr.2017.10.168
Used HHVAT System/ Technology
CT150
Application
Semiconductor
January 2018
Texturization of ZnO:Al surface by reactive ion etching in SF6/Ar, CHF3/Ar plasma for application in thin film silicon solar cells
Gourab Das, Sukanta Bose, Jayasree R. Sharma, Sumita Mukhopadhyay, and Asok K. Barua
DOI : 10.1016/j.matpr.2017.10.168
HHV PECVD
Photovoltaics
Publication date
January 2018
Research Paper Title
Texturization of ZnO:Al surface by reactive ion etching in SF6/Ar, CHF3/Ar plasma for application in thin film silicon solar cells
Authors
Gourab Das, Sukanta Bose, Jayasree R. Sharma, Sumita Mukhopadhyay, and Asok K. Barua
Publication link
DOI : 10.1016/j.matpr.2017.10.168
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
April 2017
Fabrication and Analysis of Amorphous Silicon TFT
Srikanth G, Yadhuraj S R, Subramanyam T K, Satheesh Babu Gandla, and Uma B V
DOI : 10.11591/ijece.v7i2.pp754-758
HHV PECVD
Semiconductor
Publication date
April 2017
Research Paper Title
Fabrication and Analysis of Amorphous Silicon TFT
Authors
Srikanth G, Yadhuraj S R, Subramanyam T K, Satheesh Babu Gandla, and Uma B V
Publication link
DOI : 10.11591/ijece.v7i2.pp754-758
Used HHVAT System/ Technology
HHV PECVD
Application
Semiconductor
January 2017
Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells
Hemanta Ghosh, Suchismita Mitra, Hiranmay Saha, Swapan Kumar Datta, and Chandan Banerjee
DOI : 10.1016/j.mseb.2016.11.003
HHV PECVD
Photovoltaics
Publication date
January 2017
Research Paper Title
Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells
Authors
Hemanta Ghosh, Suchismita Mitra, Hiranmay Saha, Swapan Kumar Datta, and Chandan Banerjee
Publication link
DOI : 10.1016/j.mseb.2016.11.003
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
December 2016
Optical and electrical effects of thin reduced graphene oxide layers on textured wafer-based c-Si solar cells for enhanced performance
Anupam Nandi, Sanhita Majumdar, Swapan K. Datta, Hiranmay Sahaa and Syed Minhaz Hossain
DOI : 10.1039/C6TC04030F
CT150
Photovoltaics
Publication date
December 2016
Research Paper Title
Optical and electrical effects of thin reduced graphene oxide layers on textured wafer-based c-Si solar cells for enhanced performance
Authors
Anupam Nandi, Sanhita Majumdar, Swapan K. Datta, Hiranmay Sahaa and Syed Minhaz Hossain
Publication link
DOI : 10.1039/C6TC04030F
Used HHVAT System/ Technology
CT150
Application
Photovoltaics
December 2016
Development of n-type microcrystalline SiOx:H films and its application by innovative way to improve the performance of single junction µc-Si:H solar cell
Gourab Das, Sourav Mandal, Sukanta Dhar, Sukanta Bose, Sumita Mukhopadhyay, Chandan Banerjee and A. K. Barua
DOI : 10.1007/s10854-016-6246-y
HHV PECVD
Photovoltaics
Publication date
December 2016
Research Paper Title
Development of n-type microcrystalline SiOx:H films and its application by innovative way to improve the performance of single junction µc-Si:H solar cell
Authors
Gourab Das, Sourav Mandal, Sukanta Dhar, Sukanta Bose, Sumita Mukhopadhyay, Chandan Banerjee and A. K. Barua
Publication link
DOI : 10.1007/s10854-016-6246-y
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
September 2016
Fabrication and Analysis of Carbon Doped Hydrogenated Amorphous Silicon Thin Film Transistors
T. K. Subramanyam, Vinuth Nagendra, Goutham P., Pavan Kumar S., and Subramanya K. N.
DOI : 10.5923/j.msse.20160501.03
HHV PECVD
Semiconductor
Publication date
September 2016
Research Paper Title
Fabrication and Analysis of Carbon Doped Hydrogenated Amorphous Silicon Thin Film Transistors
Authors
T. K. Subramanyam, Vinuth Nagendra, Goutham P., Pavan Kumar S., and Subramanya K. N.
Publication link
DOI : 10.5923/j.msse.20160501.03
Used HHVAT System/ Technology
HHV PECVD
Application
Semiconductor
September 2016
Optimization of A-SIC: HASBUFFER Layer for efficiency enhancement of amorphous Silicon Solar cells
T.K.Subramanyam, Thulasi, Ankita Bengani, Bharath Shivkumar, and R.Suresh
DOI : 10.5923/j.msse.20160501.03
HHV PECVD
Photovoltaics
Publication date
September 2016
Research Paper Title
Optimization of A-SIC: HASBUFFER Layer for efficiency enhancement of amorphous Silicon Solar cells
Authors
T.K.Subramanyam, Thulasi, Ankita Bengani, Bharath Shivkumar, and R.Suresh
Publication link
DOI : 10.5923/j.msse.20160501.03
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
September 2016
Optimization of A-SIC: HASBUFFER Layer for efficiency enhancement of amorphous Silicon Solar cells
T.K.Subramanyam, Thulasi, Ankita Bengani, Bharath Shivkumar, and R.Suresh
HHV PECVD
Photovoltaics
Publication date
September 2016
Research Paper Title
Optimization of A-SIC: HASBUFFER Layer for efficiency enhancement of amorphous Silicon Solar cells
Authors
T.K.Subramanyam, Thulasi, Ankita Bengani, Bharath Shivkumar, and R.Suresh
Publication link
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
February 2016
Development of optimized n-μc-Si:H/n-a-Si:H bilayer and its application for improving the performance of single junction a-Si solar cells
Sourav Mandal, Sukanta Dhar, Gourab Das, Sumita Mukhopadhyay, and A.K. Barua
DOI : 10.1016/j.solener.2015.11.042
HHV PECVD
Photovoltaics
Publication date
February 2016
Research Paper Title
Development of optimized n-μc-Si:H/n-a-Si:H bilayer and its application for improving the performance of single junction a-Si solar cells
Authors
Sourav Mandal, Sukanta Dhar, Gourab Das, Sumita Mukhopadhyay, and A.K. Barua
Publication link
DOI : 10.1016/j.solener.2015.11.042
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
January 2016
Study and Optimization Optical and Electrical properties of the p, i and n- Layers of Single Junction a:Si-H Solar cell in an Indigenously Developed PECVD Cluster System
T.K.Subramanyam, Shilpa.G.D., S.S Omprakash, R.Suresh and B.S.Satyanarayana
HHV PECVD
Photovoltaics
Publication date
January 2016
Research Paper Title
Study and Optimization Optical and Electrical properties of the p, i and n- Layers of Single Junction a:Si-H Solar cell in an Indigenously Developed PECVD Cluster System
Authors
T.K.Subramanyam, Shilpa.G.D., S.S Omprakash, R.Suresh and B.S.Satyanarayana
Publication link
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics
May 2015
Development of a novel fluorinated n-nc-SiO:H material for solar cell application
Sourav Mandal, Gourab Das, Sukanta Dhar, Rajive M. Tomy, Sumita Mukhopadhyay, Chandan Banerjee, and A.K. Barua
DOI : 10.1016/j.matchemphys.2015.03.027
HHV PECVD
Photovoltaics
Publication date
May 2015
Research Paper Title
Development of a novel fluorinated n-nc-SiO:H material for solar cell application
Authors
Sourav Mandal, Gourab Das, Sukanta Dhar, Rajive M. Tomy, Sumita Mukhopadhyay, Chandan Banerjee, and A.K. Barua
Publication link
DOI : 10.1016/j.matchemphys.2015.03.027
Used HHVAT System/ Technology
HHV PECVD
Application
Photovoltaics